● Stable performance, false-reject rate is 0 and false-missing rate is 0.5%
● Function of cyclic inspection, it can detect the leaked cells
● Operating parameters such as leakage rate, detection time, detection pressure and alarm value can be set according to process requirements
● The function of automatic helium removal can quickly and effectively eliminate the residual helium gas in the box and pipeline
● Machine capacity: ≥12PPM ● FTY (First Time Yield): ≥99.5% ● Vacuuming Time: ≤20s ● Helium Detection Time: ≤5s
● Minimum Detectable Leakage Rate: ≤10-12Pa·m³/s ● Leakage Rate Display Range: ≥1.0×10-12Pa·m³/s-1.0×10-3Pa·m³/s ● Detected Chamber Leakproofness: ≤50Pa/min
● Robot automatic loading and unloading mechanism ● Leakage test by vacuum-chamber Helium Mass Spectrometry ● NG buffer and re-examine function
● Gas concentration
